ASML shares climb as Samsung, TSMC back High NA EUV

ASML’s shares rose after Samsung and Taiwan Semiconductor Manufacturing Co. announced plans to adopt the company’s High-NA EUV lithography systems. Samsung said it will use High-NA EUV for DRAM production starting in 2028. TSMC said it will begin deploying the machines for advanced logic from 2030, initially using existing 6-inch photomasks. U.S.-listed ASML shares gained about 3% in premarket trading, while Amsterdam-listed stock was up just over 1%.

High-NA EUV systems print smaller and more detailed circuit patterns on silicon wafers than current EUV tools, which can reduce the need for multiple patterning steps during manufacturing. Each High-NA machine carries an approximate price tag of $400 million.

TSMC had previously expressed caution about High-NA, saying productivity advantages did not yet justify the cost. The company’s revised timeline reflects a reassessment of those trade-offs. TSMC represents about 16% of ASML’s revenue. Intel has also been identified among early users of High-NA equipment.

ASML plans to demonstrate a pilot production line using larger, 12-inch photomasks by 2031 and expects the technology to be ready for high-volume production by 2033. The company is working with Samsung and TSMC on the 12-inch mask format. ASML’s chief technology officer, Marco Pieters, estimated that adopting the larger masks could raise system productivity by roughly 40%.

Market analysts said the customer commitments clarify the pace of High-NA adoption. Barclays wrote the announcements should provide more visibility on adoption. BofA Global Research maintained a Buy rating on ASML with a price target of €2,452 and projects a stronger revenue growth profile for ASML compared with many peers. Consensus estimates cited by analysts show about 27% compound annual revenue growth for ASML versus a 22% peer average.

ASML raised its financial guidance for 2026 and plans to increase total EUV capacity by about 30% in 2027. Analysts noted that stronger customer commitments could lead the company to consider further capacity expansion. With Samsung, TSMC and Intel aligning on High-NA timetables, ASML has increased visibility into potential demand for its next-generation machines.